Measuring ion velocity distribution functions through high-aspect ratio holes in inductively coupled plasmas
Author:
Publisher
AIP Publishing
Subject
Physics and Astronomy (miscellaneous)
Link
http://aip.scitation.org/doi/pdf/10.1063/1.4942892
Reference19 articles.
1. Microscopic uniformity in plasma etching
2. Ion energy and angular distributions in inductively driven radio frequency discharges in chlorine
3. Ion energy and angular distribution at the radio frequency biased electrode in an inductively coupled plasma apparatus
4. Aspect-ratio-dependent charging in high-density plasmas
5. High energy electron fluxes in dc-augmented capacitively coupled plasmas. II. Effects on twisting in high aspect ratio etching of dielectrics
Cited by 5 articles. 订阅此论文施引文献 订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献
1. Energy-Resolving Time-of-Flight Mass Spectrometry for Bulk Plasma Analysis;Journal of the American Society for Mass Spectrometry;2024-07-11
2. Ion motion above a biased wafer in a plasma etching reactor;Physics of Plasmas;2024-06-01
3. Transient-assisted plasma etching (TAPE): Concept, mechanism, and prospects;Journal of Vacuum Science & Technology A;2024-04-03
4. Progress and perspectives in dry processes for nanoscale feature fabrication: fine pattern transfer and high-aspect-ratio feature formation;Japanese Journal of Applied Physics;2019-05-30
5. The interplay between surface charging and microscale roughness during plasma etching of polymeric substrates;Journal of Applied Physics;2018-02-21
1.学者识别学者识别
2.学术分析学术分析
3.人才评估人才评估
"同舟云学术"是以全球学者为主线，采集、加工和组织学术论文而形成的新型学术文献查询和分析系统，可以对全球学者进行文献检索和人才价值评估。用户可以通过关注某些学科领域的顶尖人物而持续追踪该领域的学科进展和研究前沿。经过近期的数据扩容，当前同舟云学术共收录了国内外主流学术期刊6万余种，收集的期刊论文及会议论文总量共计约1.5亿篇，并以每天添加12000余篇中外论文的速度递增。我们也可以为用户提供个性化、定制化的学者数据。欢迎来电咨询！咨询电话：010-8811{复制后删除}0370
www.globalauthorid.com
TOP
Copyright © 2019-2024 北京同舟云网络信息技术有限公司 京公网安备11010802033243号 京ICP备18003416号-3