AlGaN/GaN high electron mobility transistors with a low sub-threshold swing on free-standing GaN wafer

Author:

Liu Xinke1,Gu Hong1,Li Kuilong1,Guo Lunchun1,Zhu Deliang1,Lu Youming1,Wang Jianfeng2,Kuo Hao-Chung3ORCID,Liu Zhihong4ORCID,Liu Wenjun5,Chen Lin5,Fang Jianping6,Ang Kah-Wee4,Xu Ke2,Ao Jin-Ping1

Affiliation:

1. College of Materials Science and Engineering, Shenzhen Key Laboratory of Special Functional Materials, Chinese Engineering and Research Institute of Microelectronics, Shenzhen University, Shenzhen 518060, People’s Republic of China

2. Suzhou Institute of Nano-Tech and Nano-Bionics (SINANO), CAS, Suzhou 215123, People’s Republic of China

3. Department of Photonics and Institute of Electro-Optical Engineering, National Chiao Tung University, Hsinchu 300, Taiwan

4. Department of Electrical and Computer Engineering, National University of Singapore, 117583, Singapore

5. Department of Microelectronics, Fudan University, Shanghai 200433, People’s Republic of China

6. School of Microelectronics, Xidian University, Xi’an 710071, People’s Republic of China

Funder

National key research and development plan

Publisher

AIP Publishing

Subject

General Physics and Astronomy

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