A Selective Toolbox for Nanofabrication
Author:
Affiliation:
1. Department of Materials Science Engineering, Incheon National University, Incheon, 22012, Korea
2. Department of Chemical Engineering, Stanford University, Stanford, California 94305, United States
Publisher
American Chemical Society (ACS)
Subject
Materials Chemistry,General Chemical Engineering,General Chemistry
Link
https://pubs.acs.org/doi/pdf/10.1021/acs.chemmater.0c00838
Reference18 articles.
1. Selective Ru ALD as a Catalyst for Sub-Seven-Nanometer Bottom-Up Metal Interconnects
2. Selective Area Spatial Atomic Layer Deposition of ZnO, Al2O3, and Aluminum-Doped ZnO Using Poly(vinyl pyrrolidone)
3. Nucleation-Controlled Growth of Nanoparticles by Atomic Layer Deposition
4. Contact Area Lithography (CAL): A New Approach to Direct Formation of Nanometric Chemical Patterns
5. Substrate Selectivity of (tBu-Allyl)Co(CO)3 during Thermal Atomic Layer Deposition of Cobalt
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