Nucleation-Controlled Growth of Nanoparticles by Atomic Layer Deposition
Author:
Affiliation:
1. Department of Chemical Engineering, ‡Department of Physics, §Department of Materials Science and Engineering, Stanford University, Stanford, California 94305, United States
Publisher
American Chemical Society (ACS)
Subject
Materials Chemistry,General Chemical Engineering,General Chemistry
Link
https://pubs.acs.org/doi/pdf/10.1021/cm3014978
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