Author:
Corni F.,Tonini R.,Ottaviani G.,Servidori M.,Priolo F.
Subject
Materials Chemistry,Metals and Alloys,Surfaces, Coatings and Films,Surfaces and Interfaces,Electronic, Optical and Magnetic Materials
Cited by
3 articles.
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1. Damage removal and boron diffusion during solid phase epitaxial growth of SiGe alloy layers;Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms;1999-04
2. Carbon incorporation into Si at high concentrations by ion implantation and solid phase epitaxy;Journal of Applied Physics;1996
3. The role of strain in the crystallisation of Ge implanted (100) Si;Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms;1994-03