Regrowth of amorphous films
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Published:1978-09
Issue:5
Volume:15
Page:1656-1661
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ISSN:0022-5355
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Container-title:Journal of Vacuum Science and Technology
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language:en
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Short-container-title:Journal of Vacuum Science and Technology
Publisher
American Vacuum Society
Subject
General Engineering
Cited by
70 articles.
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