Carbon incorporation into Si at high concentrations by ion implantation and solid phase epitaxy
Author:
Publisher
AIP Publishing
Subject
General Physics and Astronomy
Reference35 articles.
1. Stability of strained Si1−yCy random alloy layers
2. Superlattices of group IV elements, a new possibility to produce direct band gap material
3. The solubility of carbon in pulled silicon crystals
4. J. S. Williams,Surface Modification and Alloying by Laser, Ion, and Electron Beam, edited by J. M. Poate, G. Foti, and D. C. Jacobson (Plenum, New York, 1983), p. 133.
5. The Role of Carbon and Point Defects in Silicon
Cited by 61 articles. 订阅此论文施引文献 订阅此论文施引文献,注册后可以免费订阅5篇论文的施引文献,订阅后可以查看论文全部施引文献
1. Kinetic Monte Carlo Simulations for Recrystallization Process of Discrete Amorphous Regions in C3 H5-Molecular-Ion-Implanted Silicon Substrate Surface;2023 21st International Workshop on Junction Technology (IWJT);2023-06-08
2. Uphill phosphorus diffusion in carbon co-implanted silicon;Journal of Applied Physics;2022-03-21
3. Low temperature carbon co-implantation in silicon: Defects suppression and diffusion modeling;Journal of Applied Physics;2021-05-21
4. Detection of acceptor-bound exciton peak at 300 K in boron–phosphorus co-doped ZnMgO thin films for room-temperature optoelectronics applications;Optical Materials;2021-01
5. Atom probe tomography quantification of carbon in silicon;Ultramicroscopy;2021-01
1.学者识别学者识别
2.学术分析学术分析
3.人才评估人才评估
"同舟云学术"是以全球学者为主线,采集、加工和组织学术论文而形成的新型学术文献查询和分析系统,可以对全球学者进行文献检索和人才价值评估。用户可以通过关注某些学科领域的顶尖人物而持续追踪该领域的学科进展和研究前沿。经过近期的数据扩容,当前同舟云学术共收录了国内外主流学术期刊6万余种,收集的期刊论文及会议论文总量共计约1.5亿篇,并以每天添加12000余篇中外论文的速度递增。我们也可以为用户提供个性化、定制化的学者数据。欢迎来电咨询!咨询电话:010-8811{复制后删除}0370
www.globalauthorid.com
TOP
Copyright © 2019-2024 北京同舟云网络信息技术有限公司 京公网安备11010802033243号 京ICP备18003416号-3