Characterization of radical-enhanced atomic layer deposition process based on microwave surface wave generated plasma-Reference-Cited by-同舟云学术

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Characterization of radical-enhanced atomic layer deposition process based on microwave surface wave generated plasma

Published:2021-07-07 Issue:1 Volume:130 Page:013301
ISSN:0021-8979
Container-title:Journal of Applied Physics
language:en
Short-container-title:Journal of Applied Physics

Author:

Tvarog Drahoslav¹²^ORCID,Olejníček Jiří¹^ORCID,Kratochvíl Jiří¹^ORCID,Kšírová Petra¹^ORCID,Poruba Aleš³,Hubička Zdeněk¹^ORCID,Čada Martin¹^ORCID

Affiliation:

1. Institute of Physics v. v. i., Czech Academy of Sciences, Na Slovance 2, 182 21 Prague 8, Czech Republic

2. Joint Laboratory of Optics, Palacký University, Av. 17. listopadu 50A, 772 07 Olomouc, Czech Republic

3. SVCS Process Innovation Ltd., Optátova 37, 637 00 Brno, Czech Republic

Funder

Technology Agency of the Czech Republic

Ministerstvo Školství, Mládeže a Tělovýchovy

Publisher

AIP Publishing

Subject

General Physics and Astronomy

Link

https://aip.scitation.org/doi/pdf/10.1063/5.0046829

Reference36 articles.

1. Atomic Layer Deposition

2. Crystallinity of inorganic films grown by atomic layer deposition: Overview and general trends

3. Atomic Layer Deposition: An Overview

4. Optical and barrier properties of thin-film encapsulations for transparent OLEDs

5. Plasma-Assisted Atomic Layer Deposition: Basics, Opportunities, and Challenges

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1. Plasma-Assisted Nanofabrication: The Potential and Challenges in Atomic Layer Deposition and Etching;Nanomaterials;2022-10-06

2. A Mini Review on Thin Film Superconductors;Processes;2022-06-14

3. Importance of higher‐level excited species in argon remote plasma sources: Numerical modeling with consideration of detailed chemical reaction pathways;Plasma Processes and Polymers;2022-03-24

4. Formation and evolution of striation plasma in high-pressure argon glow discharge;Acta Physica Sinica;2022

5. A review of atomic layer deposition modelling and simulation methodologies: Density functional theory and molecular dynamics;Nanotechnology Reviews;2022-01-01

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