Atomic Layer Deposition
Author:
Publisher
John Wiley & Sons, Inc.
Link
http://onlinelibrary.wiley.com/wol1/doi/10.1002/9781118747407/fullpdf
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1. Towards modeling of ZrO2 atomic layer deposition at reactor scale based on experimental kinetic approximation;Applied Surface Science;2024-02
2. Area-Selective Atomic Layer Deposition of ZnO on Si\SiO2 Modified with Tris(dimethylamino)methylsilane;Materials;2023-06-29
3. Controlling the Surface Silanol Density in Capillary Columns and Planar Silicon Via the Self-Limiting Gas-Phase Deposition of Tris(Dimethylamino)Methylsilane, and Quantification of Surface Silanols after Silanization by Low Energy Ion Scattering;2023
4. Temperature and time dependent electron trapping in Al2O3 thin films onto AlGaN/GaN heterostructures;Applied Surface Science;2022-03
5. Tunable Ti3+-Mediated Charge Carrier Dynamics of Atomic Layer Deposition-Grown Amorphous TiO2;The Journal of Physical Chemistry C;2022-02-25
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