Atomic Layer Deposition: An Overview
Author:
Affiliation:
1. Department of Chemistry and Biochemistry and Department of Chemical and Biological Engineering, University of Colorado, Boulder, Colorado 80309
Publisher
American Chemical Society (ACS)
Subject
General Chemistry
Link
https://pubs.acs.org/doi/pdf/10.1021/cr900056b
Reference226 articles.
1. International Technology Roadmap for Semiconductors, 2007 Edition,http://www.itrs.net/.
2. Thin film atomic layer deposition equipment for semiconductor processing
3. Atomic Layer Deposition of AlO[sub x] for Thin Film Head Gap Applications
4. Oxygen diffusion barrier properties of transparent oxide coatings on polymeric substrates
5. Surface Chemistry for Atomic Layer Growth
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