Effect of metastable oxygen molecules in high density power-modulated oxygen discharges
Author:
Publisher
AIP Publishing
Subject
General Physics and Astronomy
Link
http://aip.scitation.org/doi/pdf/10.1063/1.373544
Reference61 articles.
1. Effects of low‐frequency modulation on rf discharge chemical vapor deposition
2. Powder‐free plasma chemical vapor deposition of hydrogenated amorphous silicon with high rf power density using modulated rf discharge
3. Enhancement of the plasma density and deposition rate in rf discharges
4. Particle generation and behavior in a silane‐argon low‐pressure discharge under continuous or pulsed radio‐frequency excitation
5. Etching in a pulsed plasma
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