Particle generation and behavior in a silane‐argon low‐pressure discharge under continuous or pulsed radio‐frequency excitation
Author:
Publisher
AIP Publishing
Subject
General Physics and Astronomy
Link
http://aip.scitation.org/doi/pdf/10.1063/1.349484
Reference21 articles.
1. Particle Distributions and Laser-Particle Interactions in an RF Discharge of Silane
2. Particle densities in radio-frequency discharges of silane
3. In situ laser diagnostic studies of plasma‐generated particulate contamination
4. In situ plasma contamination measurements by HeNe laser light scattering: A case study
5. Effects of low‐frequency modulation on rf discharge chemical vapor deposition
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