Thermal power at a substrate during ZnO:Al thin film deposition in a planar magnetron sputtering system
Author:
Publisher
AIP Publishing
Subject
General Physics and Astronomy
Link
http://aip.scitation.org/doi/pdf/10.1063/1.366092
Reference13 articles.
1. Substrate heating in cylindrical magnetron sputtering sources
2. Plasma Diagnostics and Energy Transport of a dc Discharge Used for Sputtering
3. Evaporating and sputtering: Substrate heating dependence on deposition rate
4. Substrate effects from an unbalanced magnetron
5. On the ion energy transfer to the substrate during titanium deposition in a hollow cathode arc discharge
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