Plasma Diagnostics and Energy Transport of a dc Discharge Used for Sputtering
Author:
Publisher
AIP Publishing
Subject
General Physics and Astronomy
Link
http://aip.scitation.org/doi/pdf/10.1063/1.1661657
Reference12 articles.
1. Substrate bombardment in rf sputtering systems
2. Substrate Bombardment During RF Sputtering
3. Sputtering Multilayered Conductor Films
4. Reliability of Probe Measurements in Hot Cathode Gas Diodes
5. On the Analysis of Electronic Velocities by Electrostatic Means
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