The Energy Flux to the Substrate in the High-Power Impulse Magnetron Sputtering of Copper Films
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Published:2023-12
Issue:S2
Volume:87
Page:S255-S261
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ISSN:1062-8738
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Container-title:Bulletin of the Russian Academy of Sciences: Physics
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language:en
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Short-container-title:Bull. Russ. Acad. Sci. Phys.
Author:
Oskirko V. O.ORCID, Zakharov A. N.ORCID, Grenadyorov A. S.ORCID, Semenov V. A.ORCID, Solovyev A. A.ORCID
Publisher
Pleiades Publishing Ltd
Reference32 articles.
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