Model for ion‐assisted thin‐film densification
Author:
Publisher
AIP Publishing
Subject
General Physics and Astronomy
Link
http://aip.scitation.org/doi/pdf/10.1063/1.336960
Reference15 articles.
1. Role of ions in ion-based film formation
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3. Ion-based methods for optical thin film deposition
4. Effect of ion bombardment on the initial stages of thin film growth
5. Ion-beam-enhanced adhesion in the electronic stopping region
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