On the ion energy transfer to the substrate during titanium deposition in a hollow cathode arc discharge
Author:
Publisher
Elsevier BV
Subject
Surfaces, Coatings and Films,Condensed Matter Physics,Instrumentation
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5. Structural and Electrochemical Characterization of Nanostructured Titanium Thin Films Prepared by DC Magnetron Sputtering with Supported Discharge;Iranian Journal of Science and Technology, Transactions A: Science;2019-06-18
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