Kinetics and mechanisms of stress relaxation in sputtered silver thin films
Author:
Funder
ANRT
Agence Nationale de la Recherche
Publisher
Elsevier BV
Subject
Metals and Alloys,Polymers and Plastics,Ceramics and Composites,Electronic, Optical and Magnetic Materials
Reference71 articles.
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5. Tutorial: understanding residual stress in polycristalline thin films through real-time measurements and physical models;Chason;J. Appl. Phys.,2016
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