Review Article: Stress in thin films and coatings: Current status, challenges, and prospects

Author:

Abadias Grégory1,Chason Eric2,Keckes Jozef3,Sebastiani Marco4,Thompson Gregory B.5,Barthel Etienne6,Doll Gary L.7,Murray Conal E.8,Stoessel Chris H.9,Martinu Ludvik10

Affiliation:

1. Département de Physique et Mécanique des Matériaux, Institut Pprime, UPR 3346, CNRS-Université de Poitiers-ENSMA, SP2MI, Téléport 2, F86962 Futuroscope-Chasseneuil, France

2. School of Engineering, Brown University, Providence, Rhode Island 02912-9104

3. Department of Materials Physics, Montanuniversität Leoben and Erich Schmid Institute for Materials Science, Austrian Academy of Sciences, Leoben 8700, Austria

4. Engineering Department, University of Rome “ROMA TRE,” Via della Vasca Navale 79, Rome 00147, Italy

5. Department of Metallurgical and Materials Engineering, The University of Alabama, P.O. Box 870202, Tuscaloosa, Alabama 35487-0202

6. Laboratoire Sciences et Ingénierie de la Matière Molle, ESPCI Paris, PSL University, Sorbonne Université, CNRS, F-75005 Paris, France

7. Mechanical Engineering Department, The University of Akron, Akron, Ohio 44325-0406

8. IBM T.J. Watson Research Center, Yorktown Heights, New York 10598

9. Eastman Chemical Co., 3788 Fabian Way, Palo Alto, California 94303

10. Department of Engineering Physics, Polytechnique Montréal, Montreal, Quebec H3T 1J4, Canada

Funder

European Commission

National Science Foundation

U.S. Department of Energy

DOD | United States Army | RDECOM | Army Research Office

Publisher

American Vacuum Society

Subject

Surfaces, Coatings and Films,Surfaces and Interfaces,Condensed Matter Physics

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