Tutorial: Understanding residual stress in polycrystalline thin films through real-time measurements and physical models
Author:
Affiliation:
1. School of Engineering, Brown University, Providence, Rhode Island 02912-9104, USA
Funder
Basic Energy Sciences (BES)
Publisher
AIP Publishing
Subject
General Physics and Astronomy
Link
http://aip.scitation.org/doi/am-pdf/10.1063/1.4949263
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5. Electromigration in thin aluminum films on titanium nitride
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