Subject
Materials Chemistry,Metals and Alloys,Surfaces, Coatings and Films,Surfaces and Interfaces,Electronic, Optical and Magnetic Materials
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1. Magnetron sputtering: basic physics and application to cylindrical magnetrons
2. Sputtering efficiency of amorphous substances
3. A. S. Penfold, Telic Corporation, personal communication, December 1977.
4. Metallurgical Thermochemistry;Kubaschewski,1967
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