Magnetron sputtering: basic physics and application to cylindrical magnetrons-Reference-Cited by-同舟云学术

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Magnetron sputtering: basic physics and application to cylindrical magnetrons

Published:1978-03 Issue:2 Volume:15 Page:171-177
ISSN:0022-5355
Container-title:Journal of Vacuum Science and Technology
language:en
Short-container-title:Journal of Vacuum Science and Technology

Author:

Thornton John A.

Publisher

American Vacuum Society

Subject

General Engineering

Link

http://avs.scitation.org/doi/pdf/10.1116/1.569448

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