Direct ion flux measurements at high-pressure-depletion conditions for microcrystalline silicon deposition
Author:
Publisher
AIP Publishing
Subject
General Physics and Astronomy
Link
http://aip.scitation.org/doi/pdf/10.1063/1.4817859
Reference44 articles.
1. Microcrystalline silicon solar cells deposited at high rates
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5. High Rate Deposition of Microcrystalline Silicon Using Conventional Plasma-Enhanced Chemical Vapor Deposition
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