1. W. Hoffmann, in Proceedings of the 17th EPVSEC, Munich, Germany, 2001, edited by B. McNellis, W. Palz, A. Ossenbrink, and P. Helm (WIP-Munich, München, Germany, 2002), p. 851.
2. Potential of amorphous silicon for solar cells
3. High Rate Deposition of Microcrystalline Silicon Using Conventional Plasma-Enhanced Chemical Vapor Deposition
4. Device grade microcrystalline silicon owing to reduced oxygen contamination
5. K. Saito, M. Sano, K. Matuda, T. Kondo, T. Nishimoto, K. Ogawa, and I. Kajita, in Proceedings of the Second World Conference on Photovoltaic Solar Energy Conversion, Vienna, Italy, 1998 (European Commission, Ispra, Italy, 1998), p. 351.