Microcrystalline silicon solar cells deposited at high rates
Author:
Publisher
AIP Publishing
Subject
General Physics and Astronomy
Link
http://aip.scitation.org/doi/pdf/10.1063/1.1927689
Reference37 articles.
1. Formation kinetics and control of microcrystallite in μc-Si:H from glow discharge plasma
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3. High rate growth of microcrystalline silicon at low temperatures
4. Growth of device grade μc-Si film at over 50Å/s using PECVD
5. Analysis of high-rate a-Si:H deposition in a VHF plasma
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