Formation kinetics and control of microcrystallite in μc-Si:H from glow discharge plasma
Author:
Publisher
Elsevier BV
Subject
Materials Chemistry,Condensed Matter Physics,Ceramics and Composites,Electronic, Optical and Magnetic Materials
Reference15 articles.
1. Electrical and Structural Properties of Phosphorous-Doped Glow-Discharge Si:F:H and Si:H Films
2. Boron Doping of Hydrogenated Silicon Thin Films
3. The preparation of thin layers of Ge and Si by chemical hydrogen plasma transport
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