In Situ Quadrupole Mass Spectrometry and Quartz Crystal Microbalance Studies on the Atomic Layer Deposition of Titanium Dioxide from Titanium Tetrachloride and Water-Reference-Cited by-同舟云学术

In Situ Quadrupole Mass Spectrometry and Quartz Crystal Microbalance Studies on the Atomic Layer Deposition of Titanium Dioxide from Titanium Tetrachloride and Water

Published:2001-11-30 Issue:12 Volume:13 Page:4506-4511
ISSN:0897-4756
Container-title:Chemistry of Materials
language:en
Short-container-title:Chem. Mater.

Author:

Matero Raija¹,Rahtu Antti¹,Ritala Mikko¹

Affiliation:

1. Laboratory of Inorganic Chemistry, Department of Chemistry, P.O. Box 55, FIN-00014 University of Helsinki, Finland

Publisher

American Chemical Society (ACS)

Subject

Materials Chemistry,General Chemical Engineering,General Chemistry

Link

https://pubs.acs.org/doi/pdf/10.1021/cm011046%2B

Reference21 articles.

1. Atomic layer epitaxy

2. Perfectly Conformal TiN and Al2O3 Films Deposited by Atomic Layer Deposition

3. Growth of titanium dioxide thin films by atomic layer epitaxy

4. An IR and NMR study of the chemisorption of titanium tetrachloride on silica

5. Control of thin film structure by reactant pressure in atomic layer deposition of TiO2

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