Control of thin film structure by reactant pressure in atomic layer deposition of TiO2
Author:
Publisher
Elsevier BV
Subject
Materials Chemistry,Inorganic Chemistry,Condensed Matter Physics
Reference27 articles.
1. Ultrahigh vacuum metalorganic chemical vapor deposition growth and in situ characterization of epitaxial TiO2 films
2. The effect of substrate temperature on the properties of sputtered titanium oxide films
3. Effect of Heating Probe on Reactively Sputtered TiO2Film Growth
4. Electronic structure of anatase TiO2oxide
5. Chemical composition of electron‐beam evaporated TiO2 films
Cited by 75 articles. 订阅此论文施引文献 订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献
1. Electronic structure characterization of TiO2-II with the α-PbO2 structure by electron-energy-loss-spectroscopy and comparison with anatase, brookite, and rutile;Journal of Solid State Chemistry;2023-06
2. Mechanical and optical properties of as-grown and thermally annealed titanium dioxide from titanium tetrachloride and water by atomic layer deposition;Thin Solid Films;2021-08
3. Titanium Dioxide Versatile Solid Crystalline: An Overview;Assorted Dimensional Reconfigurable Materials;2020-09-09
4. Polymorphism of nanocrystalline TiO2 prepared in a stagnation flame: formation of the TiO2-II phase;Chemical Science;2019
5. Formation of High-Pressure Phase of Titanium Dioxide (TiO2 -II) Thin Films by Vapor-Liquid-Solid Growth Process on GaAs Substrate;physica status solidi (a);2018-11-16
1.学者识别学者识别
2.学术分析学术分析
3.人才评估人才评估
"同舟云学术"是以全球学者为主线，采集、加工和组织学术论文而形成的新型学术文献查询和分析系统，可以对全球学者进行文献检索和人才价值评估。用户可以通过关注某些学科领域的顶尖人物而持续追踪该领域的学科进展和研究前沿。经过近期的数据扩容，当前同舟云学术共收录了国内外主流学术期刊6万余种，收集的期刊论文及会议论文总量共计约1.5亿篇，并以每天添加12000余篇中外论文的速度递增。我们也可以为用户提供个性化、定制化的学者数据。欢迎来电咨询！咨询电话：010-8811{复制后删除}0370
www.globalauthorid.com
TOP
Copyright © 2019-2024 北京同舟云网络信息技术有限公司 京公网安备11010802033243号 京ICP备18003416号-3