The effect of substrate temperature on the properties of sputtered titanium oxide films-Reference-Cited by-同舟云学术

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The effect of substrate temperature on the properties of sputtered titanium oxide films

Published:1993-03 Issue: Volume:65-66 Page:235-239
ISSN:0169-4332
Container-title:Applied Surface Science
language:en
Short-container-title:Applied Surface Science

Author:

Meng Li-jian,Andritschky M.,dos Santos M.P.

Publisher

Elsevier BV

Subject

Surfaces, Coatings and Films,Condensed Matter Physics,Surfaces and Interfaces,General Physics and Astronomy,General Chemistry

Reference13 articles.

1. Characterization of optical thin films

2. dc reactive magnetron sputtering of titanium‐structural and optical characterization of TiO2films

3. Influence of deposition parameters on the optical and structural properties of TiO2 films produced by reactive d.c. plasmatron sputtering

4. Reactively sputtered oxide optical coatings for inertial confinement fusion laser components

5. Investigations of TiO2 films deposited by different techniques

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1. Influence of the hydrogen content on the optical properties of TiOx thin films;Journal of Materials Science: Materials in Electronics;2019-12-14

2. Simulation of heating of the target during high-power impulse magnetron sputtering;Surface and Coatings Technology;2018-01

3. The study of processes affecting the radiation resistance of TiO2 powders after heating and modification with SiO2 nanoparticles;Journal of Thermal Analysis and Calorimetry;2017-04-26

4. Investigation on thermal stability of Ta2O5, TiO2 and Al2O3 coatings for application at high temperature;Applied Surface Science;2013-11

5. Sputtering characteristics, crystal structures, and transparent conductive properties of TiOxNy films deposited on α-Al2O3(0001) and glass substrates;Applied Surface Science;2012-12

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