Sputtering characteristics, crystal structures, and transparent conductive properties of TiOxNy films deposited on α-Al2O3(0001) and glass substrates
Author:
Publisher
Elsevier BV
Subject
Surfaces, Coatings and Films,Condensed Matter Physics,Surfaces and Interfaces,General Physics and Astronomy,General Chemistry
Reference36 articles.
1. A transparent metal: Nb-doped anatase TiO2
2. Novel transparent conducting oxide: Anatase Ti1−xNbxO2
3. rf magnetron sputter deposition of transparent conducting Nb-doped TiO2 films on SrTiO3
4. Carrier generation and transport properties of heavily Nb-doped anatase TiO2 epitaxial films at high temperatures
5. Pulsed laser deposited Nb doped TiO2 as a transparent conducting oxide
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1. Uncovering optical, magnetic, and electrical properties of epitaxial nitrogen-doped lithium ferrite films;Applied Surface Science;2024-06
2. Enhancement of photoelectrochemical performance for nitrogen-doped titanium dioxide-based thin films produced by a facile air-based sputtering deposition;Ceramics International;2024-03
3. Effect of O/N content on the phase, morphology, and optical properties of titanium oxynitride thin films;Journal of Materials Science;2023-07
4. Transparent conductive properties of TiON thin films;Journal of Vacuum Science & Technology A;2022-01
5. The Utilization of Carbon Dioxide to Prepare TiCxOy Films with Low Friction and High Anti-Corrosion Properties;Coatings;2020-05-30
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