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Atomic layer epitaxy

Published:1989 Issue:5 Volume:4 Page:261-312
ISSN:0920-2307
Container-title:Materials Science Reports
language:en
Short-container-title:Materials Science Reports

Author:

Suntola Tuomo

Publisher

Elsevier BV

Subject

General Engineering

Reference164 articles.

1. T. Suntola and M.J. Antson, U.S. Patent No. 4,058,430 (1977).

2. T. Suntola, A. Pakkala and S. Lindfors, U.S. Patent No. 4,413,033 (1983).

3. Proceedings of the 9th IVC-V ICSS;Hamilo,1983

4. T.S. Suntola, A.J. Pakkala and S.G. Lindfors, U.S. Patent No. 4,389,973 (1983).

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