IR studies of reactive DC magnetron sputtered SiC films on silicon using effective medium theory-Reference-Cited by-同舟云学术

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IR studies of reactive DC magnetron sputtered SiC films on silicon using effective medium theory

Published:2000-04 Issue:4 Volume:43 Page:215-219
ISSN:0167-577X
Container-title:Materials Letters
language:en
Short-container-title:Materials Letters

Author:

Lei Y.M,Yu Y.H,Cheng L.L,Ren C.X,Zou S.C,Wong S.P,Chen D.H,Wilson I.H

Publisher

Elsevier BV

Subject

Mechanical Engineering,Mechanics of Materials,Condensed Matter Physics,General Materials Science

Reference11 articles.

1. Ceramic Powder Compaction

2. Epitaxial growth and doping of and device development in monocyrstalline β-SiC semiconductor thin films

3. Low‐temperature growth of SiC thin films on Si and 6H–SiC by solid‐source molecular beam epitaxy

4. Growth and characterization of 3C-SiC films on Si substrates by reactive magnetron sputtering; effects of CH 4 partial pressure on the crystalline quality, structure and stoichiometry

5. Infrared absorption spectroscopy study of phase formation in SiC layers synthesized by carbon implantation into silicon with a metal vapor vacuum arc ion source

Cited by 5 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. The Influence of AlN Intermediate Layer on the Structural and Chemical Properties of SiC Thin Films Produced by High-Power Impulse Magnetron Sputtering;Micromachines;2019-03-22

2. Optical and Tribological Properties of Silicon Carbide Thin Films Grown by Reactive DC Magnetron Sputtering;Key Engineering Materials;2011-07

3. Effect of Methane Flow Rate on the Microstructural and Mechanical Properties of Silicon Carbide Thin Films Deposited by Reactive DC Magnetron Sputtering;Advances in Science and Technology;2010-10-27

4. Study of 3C-SiC and 4H-SiC films deposited using RF sputtering method;Acta Physica Sinica;2004

5. Auger electron spectroscopy study of SiC thin films deposited on silicon;Vacuum;2000-09

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