Thin films of high- dysprosium scandate prepared by metal organic chemical vapor deposition for metal–insulator–metal capacitor applications
Author:
Publisher
Elsevier BV
Subject
Materials Chemistry,Condensed Matter Physics,General Chemistry
Reference18 articles.
1. International technology Roadmap for Semiconductors, 2005 (Semiconductor Industry Association, San Jose, CA, 2005)
2. Evolution of materials technology for stacked-capacitors in 65nm embedded-DRAM
3. Dysprosium scandate thin films as an alternate amorphous gate oxide prepared by metal-organic chemical vapor deposition
4. Liquid Injection MOCVD of Dysprosium Scandate Films
5. Metallorganic Chemical Vapor Deposition of Dysprosium Scandate High-k Layers Using mmp-Type Precursors
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