Author:
Thomas Reji,Ehrhart Peter,Roeckerath Martin,van Elshocht Sven,Rije Eduard,Luysberg Martina,Boese Markus,Schubert Juergen,Caymax Matty,Waser Rainer
Publisher
The Electrochemical Society
Subject
Materials Chemistry,Electrochemistry,Surfaces, Coatings and Films,Condensed Matter Physics,Renewable Energy, Sustainability and the Environment,Electronic, Optical and Magnetic Materials
Reference28 articles.
1. International Technology Roadmap for SemiconductorsSemiconductor Industry Association, San Jose, CA (2005).
2. High-κ gate dielectrics: Current status and materials properties considerations
3. M. Aoulaiche, M. Houssa, T. Conrad, G. Groeseneken, S. De Gendt, and M. M. Heyns , inProceedings of the International Reliability Physics Symposium, IEEE, p. 317 (2006).
4. Ternary rare-earth metal oxide high-k layers on silicon oxide
5. Preparation and characterization of rare earth scandates as alternative gate oxide materials
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