Defects created by self-implantation in Si as a function of temperature and fluence
Author:
Publisher
Elsevier BV
Subject
Instrumentation,Nuclear and High Energy Physics
Reference37 articles.
1. Solid phase epitaxy of evaporated amorphous silicon films
2. Effect of structure and impurities on the epitaxial regrowth of amorphous silicon
3. Order-Disorder Transition in Single-Crystal Silicon Induced by Pulsed uv Laser Irradiation
4. Substrate‐orientation dependence of the epitaxial regrowth rate from Si‐implanted amorphous Si
5. Influence of16O,12C,14N, and noble gases on the crystallization of amorphous Si layers
Cited by 12 articles. 订阅此论文施引文献 订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献
1. Detailed microscopic analysis of self-interstitial aggregation in silicon. I. Direct molecular dynamics simulations of aggregation;Physical Review B;2010-07-19
2. Range profiles in self-ion-implanted crystalline Si;Physical Review B;1995-12-01
3. Oxygen precipitation in silicon;Journal of Applied Physics;1995-05
4. A study on secondary defects in self-ion implanted Si;Acta Physica Sinica (Overseas Edition);1993-11
5. Dynamics of lattice damage accumulation for MeV ions in silicon;Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms;1992-01
1.学者识别学者识别
2.学术分析学术分析
3.人才评估人才评估
"同舟云学术"是以全球学者为主线，采集、加工和组织学术论文而形成的新型学术文献查询和分析系统，可以对全球学者进行文献检索和人才价值评估。用户可以通过关注某些学科领域的顶尖人物而持续追踪该领域的学科进展和研究前沿。经过近期的数据扩容，当前同舟云学术共收录了国内外主流学术期刊6万余种，收集的期刊论文及会议论文总量共计约1.5亿篇，并以每天添加12000余篇中外论文的速度递增。我们也可以为用户提供个性化、定制化的学者数据。欢迎来电咨询！咨询电话：010-8811{复制后删除}0370
www.globalauthorid.com
TOP
Copyright © 2019-2024 北京同舟云网络信息技术有限公司 京公网安备11010802033243号 京ICP备18003416号-3