Power coupling mode transitions induced by tailored voltage waveforms in capacitive oxygen discharges
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Published:2017-02-07
Issue:3
Volume:26
Page:034002
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ISSN:1361-6595
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Container-title:Plasma Sources Science and Technology
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language:
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Short-container-title:Plasma Sources Sci. Technol.
Author:
Derzsi Aranka,
Bruneau Bastien,
Gibson Andrew Robert,
Johnson Erik,
O’Connell Deborah,
Gans Timo,
Booth Jean-PaulORCID,
Donkó Zoltán
Subject
Condensed Matter Physics
Cited by
48 articles.
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