Frequency coupling in dual frequency capacitively coupled radio-frequency plasmas
Author:
Publisher
AIP Publishing
Subject
Physics and Astronomy (miscellaneous)
Link
http://aip.scitation.org/doi/pdf/10.1063/1.2425044
Reference14 articles.
1. Stochastic heating in single and dual frequency capacitive discharges
2. Functional separation of biasing and sustaining voltages in two-frequency capacitively coupled plasma
3. Functional separation in two frequency operation of an inductively coupled plasma
4. Independent control of ion current and ion impact energy onto electrodes in dual frequency plasma devices
5. Electrostatic modelling of dual frequency rf plasma discharges
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