Tailored-waveform excitation of capacitively coupled plasmas and the electrical asymmetry effect-Reference-Cited by-同舟云学术

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Tailored-waveform excitation of capacitively coupled plasmas and the electrical asymmetry effect

Published:2015-11-26 Issue:1 Volume:25 Page:013001
ISSN:0963-0252
Container-title:Plasma Sources Science and Technology
language:
Short-container-title:Plasma Sources Sci. Technol.

Author:

Lafleur T

Publisher

IOP Publishing

Subject

Condensed Matter Physics

Reference142 articles.

1. Principles of Plasma Discharges and Materials Processing

2. Physics of Radio-Frequency Plasmas

3. Low Pressure Plasmas and Microstructuring Technology

4. Calculation of the auto-bias voltage for RF frequencies well above the ion-plasma frequency

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