Tailored-waveform excitation of capacitively coupled plasmas and the electrical asymmetry effect
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Published:2015-11-26
Issue:1
Volume:25
Page:013001
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ISSN:0963-0252
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Container-title:Plasma Sources Science and Technology
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language:
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Short-container-title:Plasma Sources Sci. Technol.
Subject
Condensed Matter Physics
Cited by
102 articles.
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