An experimental and computational investigation of discharge mode transitions in a partially magnetized radio frequency capacitively coupled oxygen discharge

Abstract

AbstractA magnetized capacitively coupled oxygen plasma was studied synergistically using phase resolved optical emission spectroscopy and particle‐based kinetic simulation. Discharge mode transitions from ambipolar mode into drift mode and finally into α mode induced by increasing the magnetic field were observed at different driving frequencies and different electrode gaps. The simulation results demonstrate that the discharge operating in the same mode exhibits a similar degree of electronegativity. By increasing driving frequency or electrode gap, the same discharge mode transition tends to occur at a lower magnetic field, and, meanwhile, the high electric field and electron power absorption shift from the bulk region to the sheath edge.