Electron energy distribution function in capacitively coupled RF discharges: difference between electropositive Ar and electronegative SiH4discharges
Author:
Publisher
IOP Publishing
Subject
Condensed Matter Physics
Reference26 articles.
1. Abnormally low electron energy and heating-mode transition in a low-pressure argon rf discharge at 13.56 MHz
2. Evolution of the electron-energy-distribution function during rf discharge transition to the high-voltage mode
3. Paradoxical spatial distribution of the electron temperature in a low pressure rf discharge
4. Electron acoustic waves in capacitively coupled, low-pressure rf glow discharges
5. Capacitive RF discharges modelled by particle-in-cell Monte Carlo simulation. II. Comparisons with laboratory measurements of electron energy distribution functions
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