Abnormally low electron energy and heating-mode transition in a low-pressure argon rf discharge at 13.56 MHz
Author:
Publisher
American Physical Society (APS)
Subject
General Physics and Astronomy
Link
http://harvest.aps.org/v2/journals/articles/10.1103/PhysRevLett.65.996/fulltext
Reference22 articles.
1. Spatial evolution of the electron-energy distribution in the vicinity of a discharge-tube constriction
2. A kinetic study of the plasma‐etching process. II. Probe measurements of electron properties in an rf plasma‐etching reactor
3. An electrostatic probe technique for RF plasma
4. The use of Langmuir probes and optical emission spectroscopy to measure electron energy distribution functions in RF-generated argon plasmas
5. Measurements of time varying plasma potential, temperature, and density in a 13.56 MHz radio‐frequency discharge
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