The use of Langmuir probes and optical emission spectroscopy to measure electron energy distribution functions in RF-generated argon plasmas-Reference-Cited by-同舟云学术

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The use of Langmuir probes and optical emission spectroscopy to measure electron energy distribution functions in RF-generated argon plasmas

Published:1987-07-14 Issue:7 Volume:20 Page:820-831
ISSN:0022-3727
Container-title:Journal of Physics D: Applied Physics
language:
Short-container-title:J. Phys. D: Appl. Phys.

Author:

Cox T I,Deshmukh V G I,Hope D A O,Hydes A J,Braithwaite N S J,Benjamin N M P

Publisher

IOP Publishing

Subject

Surfaces, Coatings and Films,Acoustics and Ultrasonics,Condensed Matter Physics,Electronic, Optical and Magnetic Materials

Link

http://stacks.iop.org/0022-3727/20/i=7/a=002/pdf

Reference40 articles.

1. Electron-Impact Excitation of the Argon Atom

2. Structure of RF Parallel-Plate Discharges

3. Effect of a R.F, signal on the characteristic of a langmuir probe

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