Anti-contamination SMART (Spectrum Monitoring Apparatus with Roll-to-roll Transparent film) window for optical diagnostics of plasma systems-Reference-Cited by-同舟云学术

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Anti-contamination SMART (Spectrum Monitoring Apparatus with Roll-to-roll Transparent film) window for optical diagnostics of plasma systems

Published:2021-01-01 Issue:1 Volume:92 Page:013507
ISSN:0034-6748
Container-title:Review of Scientific Instruments
language:en
Short-container-title:Review of Scientific Instruments

Author:

Kim Jongyoon¹^ORCID,Lee Kang-Il²,Jeong Hyun-Young³,Lee Ji-Hoon¹^ORCID,Choi Yong Sup²^ORCID

Affiliation:

1. Future Semiconductor Convergence Technology Research Center, Division of Electronics Engineering, Chonbuk National University, Jeonju 54896, Korea

2. Institute of Plasma Technology, Korea Institute of Fusion Energy (KFE), Gunsan 54004, Korea

3. R&D Team, YEST, Pyeongtaek 17716, Korea

Funder

National Research Foundation of Korea

Publisher

AIP Publishing

Subject

Instrumentation

Link

http://aip.scitation.org/doi/pdf/10.1063/5.0031869

Reference16 articles.

1. Mass Spectrometry of Reactive Plasmas

2. Basics of plasma spectroscopy

3. Observation of growing kinetics of particles in a helium‐diluted silane rf plasma

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