Observation of growing kinetics of particles in a helium‐diluted silane rf plasma
Author:
Publisher
AIP Publishing
Subject
Physics and Astronomy (miscellaneous)
Link
http://aip.scitation.org/doi/pdf/10.1063/1.107532
Reference10 articles.
1. Effects of low‐frequency modulation on rf discharge chemical vapor deposition
2. Particulates in aluminum sputtering discharges
3. In situ plasma contamination measurements by HeNe laser light scattering: A case study
4. In SituObservation of Particle Behavior in rf Silane Plasmas
5. Particle generation and behavior in a silane‐argon low‐pressure discharge under continuous or pulsed radio‐frequency excitation
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