Mechanical behavior of microscale carbon pillar fabricated by focused ion beam induced deposition-Reference-Cited by-同舟云学术

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Mechanical behavior of microscale carbon pillar fabricated by focused ion beam induced deposition

Published:2014-07 Issue:7 Volume:15 Page:1485-1488
ISSN:2234-7593
Container-title:International Journal of Precision Engineering and Manufacturing
language:en
Short-container-title:Int. J. Precis. Eng. Manuf.

Author:

Kim Chung-Soo,Ahn Sung-Hoon

Publisher

Springer Science and Business Media LLC

Subject

Electrical and Electronic Engineering,Industrial and Manufacturing Engineering,Mechanical Engineering

Link

http://link.springer.com/content/pdf/10.1007/s12541-014-0495-6.pdf

Reference18 articles.

1. Reyntjens, S. and Puers, R., “A Review of Focused Ion Beam Applications in Microsystem Technology,” Journal of Micromechanics and Microengineering, Vol. 11, No. 4, pp. 287–300, 2001.

2. Tseng, A. A., “Recent Developments in Micromilling using Focused Ion Beam Technology,” Journal of Micromechanics and Microengineering, Vol. 14, No. 4, pp. 15–34, 2004.

3. Tseng, A. A., “Recent Developments in Nanofabrication using Focused Ion Beams,” Small, Vol. 1, No. 10, pp. 924–939, 2005.

4. Kim, C.-S., Ahn, S.-H., and Jang, D.-Y., “Review: Developments in Micro/Nanoscale Fabrication by Focused Ion Beams,” Vacuum, Vol. 86, No. 8, pp. 1014–1035, 2012.

5. Reyntjens, S. and Puers, R., “Focused Ion Beam Induced Deposition: Fabrication of Three-Dimensional Microstructures and Young’s Modulus of the Deposited Material,” Journal of Micromechanics and Microengineering, Vol. 10, No. 2, pp. 181–188, 2000.

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