Subject
Biomaterials,Biotechnology,General Materials Science,General Chemistry
Reference63 articles.
1. Electron beam lithography in nanoscale fabrication: recent development
2. ,, Charged Particle Detection, Diagnostics, and Imaging, Vol. 4510, Proceedings of SPIE, Int. Society for Optical Eng. 2001, pp. 96-106.
3. , Handbook of VLSI Lithography, 2nd ed. ), Noyes, Park Ridge, NJ, 2001, pp. 791-855.
4. Recent developments in micromilling using focused ion beam technology
5. “Recent Developments in Nanofabrication using Ion Projection Lithography”, Small 2005, 1, 594-608.
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