Shape Memory Alloy-Based Microscale Bending Actuator Fabricated by a Focused Ion Beam Chemical Vapor Deposition (FIB-CVD) Gap-Filling Process
Author:
Publisher
Springer Science and Business Media LLC
Subject
Electrical and Electronic Engineering,Industrial and Manufacturing Engineering,Mechanical Engineering
Link
http://link.springer.com/content/pdf/10.1007/s12541-019-00250-6.pdf
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3. Power, M., Thompson, A. J., Anastasova, S., & Yang, G. Z. (2018). A monolithic force-sensitive 3D microgripper fabricated on the tip of an optical fiber using 2-photon polymerization. Small,14(16), e1703964.
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