Review: Developments in micro/nanoscale fabrication by focused ion beams-Reference-Cited by-同舟云学术

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Review: Developments in micro/nanoscale fabrication by focused ion beams

Published:2012-02 Issue:8 Volume:86 Page:1014-1035
ISSN:0042-207X
Container-title:Vacuum
language:en
Short-container-title:Vacuum

Author:

Kim Chung-Soo,Ahn Sung-Hoon,Jang Dong-Young

Publisher

Elsevier BV

Subject

Surfaces, Coatings and Films,Condensed Matter Physics,Instrumentation

Reference204 articles.

1. Focused ion beam milling;Watkins;Vacuum,1986

2. High-resolution focused ion beams;Orloff;Rev Sci Instrum,1993

3. High resolution focused ion beams: FIB and its applications;Orloff,2003

4. Critical review: focused ion beam technology and application;Melngailis;J Vac Sci Technol B,1987

5. Focused ion beam-microfabrication methods and applications;Prewett;Vacuum,1993

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