Development of sample rotator for focused ion beam micro-nano machining system-Reference-Cited by-同舟云学术

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Development of sample rotator for focused ion beam micro-nano machining system

Published:2024-03-04 Issue: Volume:48 Page:16
ISSN:
Container-title:Speckle 2023: VIII International Conference on Speckle Metrology
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Author:

guo hailin,Huang Siling,Zhao Shiyan,Zhang Xu,Xia Chaoxiang,Pei Ning,Wang Dasen

Publisher

SPIE

Reference8 articles.

1. Divergence in Focused Ion Beam Fabricating Micro Cone Structure;Xu;Journal of Tianjin University(Science and Technology),2015

2. Research on focused ion beam processing of 45˚ optical communication fiber mirror and multi-axis displacement detection

3. Method for improving resoution of FIB Micro-nano-fabrication on silicon substrate;Wang;Research and Exploration in Laboratory,2021

4. Review: Developments in micro/nanoscale fabrication by focused ion beams

5. FIB-SEM dual-beam system and its partial applicaitons;Fu;Journal of Chinese Electron Microscopy Society. Papers,2016

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