A review of focused ion beam applications in microsystem technology
Author:
Publisher
IOP Publishing
Subject
Electrical and Electronic Engineering,Mechanical Engineering,Mechanics of Materials,Electronic, Optical and Magnetic Materials
Reference31 articles.
1. Focused ion beam technology and applications
2. Focused ion beam deposition of new materials: dielectric films for device modification and mask repair, and tantalum films for x-ray mask repair
3. Microcircuit Modification Using Focused Ion Beams
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